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Silicon Carbide components for use in precision equipment.These advanced ceramics have high Modulus/ Thermal Conductivity and low density/ Coefficient of Thermal Expansion leading to very high specific stiffness and thermal stability. These attributes are essential for precision applications, such as semiconductor capital equipment, motion control systems and optics. Processing capabilities to produce large (450mm and above) near-net shaped parts with complex geometries.
Optical components made from Silicon Carbide. Excellent mechanical and thermal properties, combined with ability to form complex shapes makes these ceramics most suitable for reflective optics. Optimized microstructure allows for direct polishing. Compatible with most commercial coatings.
Ceramic hot plate made from hot pressed silicon nitride with integrated ceramic heating conductor. These are produced upto 300mm diameter and can be customized for different applications. The special properties and low mass of silicon nitride allow fast ramp rates, uniform temperature distribution and outstanding precision in control.The hot plates are very suitable for demanding processes in semiconductor processing systems, die bonding, coatings, annealing, etching etc.
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